Gas Mass Flow Controller

Gas mass flow controller

The gas mass flow controller is based on the principle of thermal mass flow measurement. With control valve. The Micro Gas Flow Controller (MFC) is used to precisely measure and control the mass flow of gas.

Features of Gas mass flow controller

  • The standard minimum flow rate of the micro gas mass flowmeter is 2ml/min. Chlorine, air, and compressed air can reach it. Some gases with a low C.F coefficient can be measured even lower
  • The standard accuracy of the gas mass flowmeter is 0.5%. 1.0% reading, 0.5% full scale accuracy, repeatability 0.2%. The accuracy of the controller is 1.0% (full scale)
  • The flowmeter’s turndown ratio is 1:100
  • The valve control range of the controller is 1:50
  • The minimum can measure 2sccm, the maximum can reach 3000slm
  • The base material of the flowmeter and controller is SS316L. The material in contact with the gas is also SS316L. It can measure some weakly corrosive gases.
  • The leak rate of the flow meter and controller is 1×10-SCCSHe.
  • Sealing material is chloro rubber, oxyprene butadiene rubber

Specifications of Gas mass flow controller

MediumSuitable for gas, weakly corrosive gas. For example: nitrogen, air, not suitable for ammonia
Response time<2.0S
communicationRS232/485, MODBUS
Output0~5V, 1~5V, 4-20mA
powered by+/-15VDC,24VDC
Work pressurePressure difference: 0.1~0.5Mpa
Maximum withstand voltage3Mpa/10Mpa
Electrical InterfaceDB15 hole
Leak rate1×10·SCCSHe
Temperature Coefficient+/-0.025%F.S/℃C
Base materialSS316L
Seal materialFluorine rubber, neoprene rubber, nitrile rubber

Extended reading: Cryogenic Liquid Nitrogen Flowmeters

Gas mass flow controller working principle

The mass flow meter uses the principle of capillary heat transfer thermometry to measure the mass flow of gas (without temperature and pressure compensation).

The flow signal measured by the sensor heating bridge is sent to the amplifier for amplification. The amplified flow measurement voltage is compared with the set voltage.

Then amplify the difference signal to control the regulating valve. Through closed-loop control to control the flow-through, and make it equal to the set flow. The flow divider determines the flow of the main channel.

The picture shows the working principle diagram of the MFC and the flow indicator connected:

The detected voltage of the flow rate output by the controller is directly proportional to the quality of the gas flowing through the channel. The full-scale detection output voltage is 5VDC. The detection range of the gas mass flow controller is 2~100% full scale (the turndown ratio is 50:1) The flow resolution is 0.1% of full scale.

Note: When the “valve control” line of the gas mass flow controller is set to the “cleaning” position, it can also be used as a gas mass flow meter. At this time, the output value of the flow detection output voltage may reach more than 10VDC.

It should be noted that once the output voltage exceeds 5VDC, the flow detection voltage and the actual flow rate are not linearly corresponding.

When cleaning, the flow rate display is inaccurate. Moreover, the flow rate may increase and the display decrease. But these will not damage the mass flow controller.

Extended reading: Mass Flow Rate vs Volumetric Flow Rate

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Liquid mass flow controller for process liquid -Sino-Inst

The liquid mass flow controller can quickly and accurately measure the volume flow/mass flow of the process liquid quickly and accurately.

  • Product SKU: Liquid mass flow controller
  • Product Brand: Sino-Inst
  • Product Currency: USD
  • Product Price: 900
  • Price Valid Until 2099-09-09
  • Product In-Stock: PreOrder

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Common types of flow controller MFC

  1. Positive displacement flow meter, also known as fixed displacement flow meter.

It uses mechanical measuring elements to continuously divide the fluid into a single known volume part. The fluid volume flow rate is measured according to the number of times that the measuring chamber is filled and discharged with the volume part of fluid successively.

  1. Float type flowmeter, also known as rotameter.

It is a kind of variable area flowmeter. In a vertical tapered tube that expands from bottom to top. The gravity of a float with a circular cross-section is borne by the hydrodynamic force. So that the float can rise and fall freely in the cone tube.

Read more about: Rotameter flow meter-Variable Area Flow Meters. Suitable for liquid and gas volumetric flow measurement and control.

  1. Differential pressure type flowmeter.

It is based on the differential pressure generated by the flow detector installed in the pipeline. Known fluid conditions and the size of the test room and pipeline to calculate the flow of the meter.

  1. Vortex flowmeter.

A non-streamline vortex generator is placed in the fluid.
The fluid is alternately separated on both sides of the generator to release two series of regularly staggered vortex meters.

Extended reading: Threaded Vortex Nitrogen Gas Flow Meter

  1. Turbine flowmeter.

It is the main type of velocity flow meters. It uses a multi-blade rotor (turbine) to sense the average flow velocity of the fluid. In order to derive the flow or total meter.

  1. Ultrasonic flow meter.

A meter that measures the flow rate by detecting the effect of fluid flow on the ultrasonic beam (or ultrasonic pulse).

  1. Electromagnetic flowmeter.

Electromagnetic flowmeter is an instrument for measuring conductive liquid made according to Faraday’s law of electromagnetic induction. Electromagnetic flowmeter has a series of excellent characteristics. It can solve the problems that other flowmeters are not easy to apply, such as the measurement of dirty flow and corrosive flow.

  1. Thermal flow meter.

The thermal flow meter sensor contains two sensing elements. A speed sensor and a temperature sensor.

They automatically compensate and correct for gas temperature changes.

The electric heating part of the instrument heats the speed sensor to a certain fixed value higher than the temperature of the working condition. A constant temperature difference is formed between the speed sensor and the sensor that measures the temperature of the working condition.

When the temperature difference is kept constant, the energy consumed by electric heating can also be said to be the heat dissipation value. It is proportional to the mass flow rate of the gas flowing through it. It is suitable for the measurement of single gas and fixed ratio multi-component gas.

  1. Coriolis flowmeter.

The principle is to use the Coriolis force generated when the fluid flows in the vibrating tube. The force is measured directly or indirectly to obtain the fluid mass flow rate.

Extended reading: Flow Totalizer F3000X for Data collection and calculation


What we usually call a mass flow controller, its full name is a thermal gas mass flow controller, or MFC for short.

The full name of mass flow meter is thermal gas mass flow meter, referred to as MFM.

They are an instrument that precisely measures gas flow. Its measured value will not be inaccurate due to changes in temperature or pressure.

A mass flow meter is a meter for measurement and monitoring. The mass flow controller not only has the function of mass flow meter. More importantly: it can automatically control the flow of gas. That is to say, the user can set the flow rate according to the needs of the situation. The flow controller automatically keeps the flow constant at the set value. Even if the system pressure fluctuates or the ambient temperature changes, it will not deviate from the original set value.

Simply put, a mass flow controller is a steady flow device. It is an automatic control gas flow stabilization device that can be manually set or connected with a calculator.

In general, if only the gas flow is measured or monitored, a mass flow meter can meet the requirements.

And if it is necessary to control the gas flow, a mass flow controller is required.

In some measurement occasions, both can be used. Such as the measurement of capillary flow capacity, when measuring flow at constant pressure, use a mass flow meter. When measuring constant flow and pressure, a mass flow controller is required.

Note that when the mass flow controller is in the cleaning state, it can also be used as a mass flow meter. It’s just that the pressure drop is larger than that of ordinary mass flow meters.

Read more about: The Pros and Cons of Micro Motion Flow Transmitters

sccm: standard milliliters/minute; slm: standard liters/minute

Standard conditions: temperature – 273.15K (0 ℃) pressure – 101325Pa (760mmHg)

F.S (Full Scale) means full scale

Thermal mass flow controllers/mass flow meters directly measure the mass flow of gases. Density dynamic detection. No compensation is required. Volumetric flow can also be measured directly.

The volume flowmeter can only measure the volume flow directly, if you want to measure the mass flow, if you give a fixed density value during configuration. This makes it impossible to detect density dynamically. Less accurate.

Mass flow controllers/flowmeters measure gases that are not affected by temperature and pressure.

Mass flow controller MFC not only has the function of mass flow meter. What’s more, it can automatically control the gas flow. The flow rate can be set according to actual needs.

The MFC automatically keeps the flow constant at the set value. Even if the system pressure fluctuates or the ambient temperature changes. It will not deviate from the error range of the set value.

Mass flow controllers can be used to control all kinds of gases. Including corrosive gases and special gases.

But pay attention to the use of corrosive gases and special gases. Proper selection of model and seal material is required.

When ordering, the user needs to declare the gas to be used. In order to avoid serious losses due to wrong selection or selection of sealing materials.

Usually, the wet material of the mass flow controller contacting the working gas is 316L stainless steel, polytetrafluoroethylene and sealing materials. Sealing materials are divided into two categories: metal seals and rubber seals. Metal seal materials are generally corrosion-resistant materials such as stainless steel, gold or nickel.

The MFC with metal seal can be used for any gas in principle, including various corrosive gases and special gases.

For strong corrosive gases such as boron tribromide, boron trichloride, and hydrogen fluoride, and metal oxide gases used in MOCVD, it is recommended to use a metal-sealed MFC.

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Sino-Inst is a manufacturer of Gas Mass Flow Controllers for Measurement of Gas. It has an accumulation function, and can operate in timing accumulation or quantitative accumulation mode respectively. After the accumulation amount is reached, the flow controller will stop automatically, which is convenient for various experimental research occasions application.

Sino-Inst Gas Mass Flow Controllers not only have the function of a mass flow meter. More importantly, it can automatically control the gas flow. That is, the user can set the flow according to the needs, and the MFC will automatically keep the flow constant at the set value. Even If the system pressure fluctuates or the ambient temperature changes, it will not deviate from the set value.

The mass flow controller is a steady flow device, which is a gas steady flow device that can be manually set or automatically controlled by connecting with a computer.

The measurement range of Sino-Inst Gas Mass Flow Controllers is wide, from full scale 5ml/min to 1500 liters/min. There are also many gas media that can be measured, suitable for general nitrogen, air, carbon dioxide, hydrogen and other gases. According to the communication method It is different, divided into 0-5V or 4-20mA analog type and RS485modbus digital type. The withstand voltage of the product is divided into 10Mpa, 5Mpa and 3Mpa according to the flow rate.

Sino-Inst’s entire team is well trained, so we can ensure that each customer’s needs are met. If you need any help with your product requirements, whether it is a Gas Mass Flow Controller, level sensors, or other equipment, please give us a call.

Gas mass flow controller for micro gas flow measure &control

The gas mass flow controller is based on the principle of thermal mass flow measurement. With control valve. The Micro Gas Flow Controller (MFC) is used to precisely measure and control the mass flow of gas.

Product SKU: Gas mass flow controller

Product Brand: Sino-Inst

Product Currency: USD

Product Price: 900

Price Valid Until: 2099-09-09

Product In-Stock: PreOrder

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This entry was posted in Mass Flow Meters, Flow Meters by KimGuo11. Bookmark the permalink.

About KimGuo11

Wu Peng, born in 1980, is a highly respected and accomplished male engineer with extensive experience in the field of automation. With over 20 years of industry experience, Wu has made significant contributions to both academia and engineering projects. Throughout his career, Wu Peng has participated in numerous national and international engineering projects. Some of his most notable projects include the development of an intelligent control system for oil refineries, the design of a cutting-edge distributed control system for petrochemical plants, and the optimization of control algorithms for natural gas pipelines.