Silicon Pressure sensor

Silicon Pressure Sensors use the piezoresistive effect of semiconductor silicon material itself and integrated circuit technology.

After the semiconductor silicon material is subjected to pressure or tension, its resistivity will change. Then, through the integrated circuit or the signal conditioning conversion circuit, the electrical signal proportional to the change of the corresponding pulling force or pressure can be output.

Silicon Pressure Sensors are widely used in the measurement of physical quantities such as tension, pressure and pressure difference. It can also be used in liquid level, weight, strain, speed, vacuum, flow detection, etc.

Silicon pressure sensor, also known as Diffused silicon pressure sensor. Piezoresistive diffusion silicon pressure transmitter, Silicon pressure transducer, also are this pressure sensors. Silicon pressure sensors are low cost. Silicon pressure sensors can work for pressure and differential pressure measurement. Sino-Inst can offer you with optical, according to your requirements. Silicon pressure sensors can work for water, air, gas, vacuum measurement.

Silicon Pressure Sensor Features

  1. Output stability and high sensitivity.

General strain gauge sensor output is only about 10mV. The full-scale output of the diffused silicon sensor is about 100mV. The influence of factors such as interference and noise is relatively small. The cost of the amplifying circuit is also reduced accordingly. Resolution is greatly improved. No dead zone near zero pressure. At present, the minimum size of the diffusion silicon pressure core is 10mm in diameter.

  1. High precision and good repeatability.

Diffusion silicon piezoresistive pressure sensor realizes pressure sensing, pressure transmission, and force-electric conversion on the same element. No intermediate conversion links. No pressure lag. Mechanical displacement deformation. Guaranteed minimal repeatability and hysteresis errors, and good linearity. No creep, stable, reliable and long life. Sino-Inst offers 0.1% accuracy, 0.25% accuracy and 0.5% accuracy silicon pressure transmitters.

  1. Good temperature characteristics

Due to the use of advanced technologies such as laser resistance adjustment, computer compensation and ingenious control of the diffusion concentration, the full-scale temperature drift (sensitivity temperature coefficient) is self-compensated. The temperature compensation range is generally -10-60 °C. It overcomes the large temperature coefficient of the semiconductor wafer itself. The defects of the diffusion silicon pressure transmitter control the zero position and full scale temperature drift to a smaller range, and widen the use temperature range.

  1. Suitable for applications in dangerous and explosive fields and places

Diffusion silicon pressure transmitter has the characteristics of low current, low voltage and low power consumption. It is an intrinsically safe explosion-proof product.

  1. High reliability and anti-interference performance

The diffusion silicon pressure transmitter adopts a series of protection measures such as stainless steel material and special protective structure, and a series of protection measures such as lightning strike, anti-interference, anti-overvoltage, and overcurrent of the amplifier circuit. It improves the reliable sealing, anti-corrosion and anti-harsh work. Environmental capability. Fully suitable for general industrial field measurement and control needs.

  1. Low cost

The front-end diaphragm of the diffused silicon pressure core used in the diffused silicon pressure transmitter is 316L. It can only measure non-corrosive air pressure, oil pressure, hydraulic pressure, etc. The temperature resistance of the diffused silicon pressure transmitter core is -20-80 ℃. Therefore, it is necessary to measure the pressure of high temperature medium. It needs to add heat sink, extend the pressure guide pipe or add condensation tank cooling method to use.

Extended reading: Best Price Ceramic Pressure Sensor

Silicon Pressure Sensor Specifiactions

Measuring medium: liquid or gas (compatible with contact material)
Overall material:
Diaphragm 316L Stainless Steel (Contact)
Process connection 304 stainless steel (contact)
Housing 304 stainless steel
Seal NBR (contact)
Hessman joint ABS engineering plastic
Pressure range: 0~35kPa…60MPa
Pressure mode: gauge pressure | absolute pressure | sealing pressure
Output signal: 4~20m4, RS485 (standard Modbus-RTU protocol)
Supply voltage: 12~24VDC
Accuracy class: 0.5%FS
Working conditions: medium temperature -40~85℃
Ambient temperature: -40~85℃
Ambient humidity: 0%~95%RH (no condensation and no condensation)
Temperature compensation: -10~70℃
Seismic performance: 10g(20…2000Hz)
Overload capacity: 200% full scale
Response frequency: analog signal output ≤ 500Hz, digital signal output ≤ 5Hz
Stable performance: ±0.2%FS/year
Temperature drift: ±0.02%PS/℃ (within temperature compensation range)
Overall weight: 190g
Protection level: IP65 Note: The above protection level refers to the level achieved after the electrical connection is complete
Power range: current type≤0.02Us(W) digital type≤0.015Us(W) Note: Us=supply voltage
Load characteristics: current load≤(Us-7.5)÷0.02(Us=supply voltage)))Q

Silicon Pressure Sensor Applications

Silicon Pressure Sensor is a kind of pressure transmitter. Mainly used to measure the pressure of gas, liquid and other objects. The parameters are then converted into standard telecom signals.

The application scope of diffusion silicon pressure transmitter mainly has the following:

  1. Petroleum/Petrochemical/Chemical
    Matched with throttling device, it provides accurate flow measurement and control.
    Measures pressure and level in pipes and tanks.
  2. Electricity/city gas/other company business
    Places such as measurement requiring high stability and high precision.
  3. Pulp and paper
    It is used in places requiring chemical resistance, corrosion resistance, etc.
  4. Steel/non-ferrous metals/ceramics
    It is used for furnace pressure measurement and other places requiring high stability and high precision measurement.
    For use where stable measurements are required under strictly controlled (temperature, humidity, etc.) conditions.
  5. Machinery/Shipbuilding
    It is used in places where stable measurement is required under high-precision conditions such as strict control of temperature and humidity.

There are many types of pressure sensors. Such as resistance strain gauge pressure sensor. Semiconductor strain gauge pressure sensor. Piezoresistive pressure sensor. Inductive pressure sensor. Capacitive pressure sensor. Resonant pressure sensor, etc.

At present, the widely used pressure sensors include: diffused silicon piezoresistive pressure sensors, ceramic piezoresistive pressure sensors, sputtering film pressure sensors, capacitive pressure sensors, and sapphire pressure sensors with high temperature resistance.

But the most widely used is the piezoresistive pressure sensor, which has extremely low price, high precision and good linearity.

When the semiconductor silicon material is subjected to force, the atomic lattice changes.
That is, the spacing of the lattice changes. Then the carrier mobility of the silicon material changes.
changes, and the concentration changes. The lateral distribution structure and longitudinal distribution of carriers are disturbed.
The distribution structure of the material eventually leads to a change in the resistivity of the material. The above is half of the
A detailed elaboration of the piezoresistive effect of conductor silicon materials.

A pressure sensor that is also widely used, that is, a resistance strain sensor. Compared with a piezoresistive pressure sensor, the working process or working principle between the two is essentially different.

Piezoresistive Effect of Semiconductor Silicon Piezoresistive Pressure Sensor and Strain Effect of Metal Strain Gauge
The difference between the two should be: the output power of the former, that is, the change of the resistance value mainly depends on the material.
The change of the resistivity of the material. The output power of the latter, that is, the change of the resistance value depends on
Changes in material geometry (strain.

The sensitivity of semiconductor silicon material is high, and its sensitivity is 50 to 100 times that of metal strain gauges.

In 1954, Smith devoted himself to researching the piezoresistive effect of semiconductor silicon material. At the same time, he used it to make pressure sensors.

The silicon pressure sensor researched in the early stage is similar to the semiconductor strain gauge. After development and research, the N-type silicon wafer is doped with P-type impurities by diffusion or ion implantation. The resistance bar is customized. It is matched behind the resistance bar Connect a suitable bridge circuit to make an integrated chip.

It is the same as the use of resistance strain gauges. The chip cannot be used independently to complete the measurement work. It also needs to be firmly attached to the elastic element to sense the change in the measured pressure.

Diffused silicon piezoresistive pressure sensor refers to a sensor made by using the above-mentioned chip as a sensitive element.

The piezoresistive chip of the piezoresistive pressure sensor is packaged in a shell, and the periphery is fixed to form a silicon cup structure.

On the circular silicon diaphragm, four resistance strips with equal resistance value are made by the above-mentioned diffusion or ion implantation doping method.

Put two of them in the range of compressive stress. The other two are fixed in the range of tensile stress. Together they form a Wheatstone bridge measurement circuit.

Resistor strips are drawn from the bridge power supply terminal and output terminal.

The above-mentioned structure is packaged by the manufacturing method of an integrated circuit to obtain a diffused silicon piezoresistive pressure sensor.

Capacitive pressure sensor is a pressure sensor that uses capacitive sensitive elements to convert the measured pressure into an electrical output that has a certain relationship with it. The characteristics are that the input energy is low, the dynamic response is high, the natural effect is small, and the environmental adaptability is good.

It generally uses a circular metal film z or a metal-plated film as an electrode of the capacitor. When the film is deformed by pressure, the capacitance formed between the film and the fixed electrode changes. The output can be in a certain relationship with the voltage by measuring the circuit. electrical signal.

Capacitive pressure sensors belong to the polar distance variable capacitive sensors. They can be divided into single capacitive pressure sensors and differential capacitive pressure sensors

Current MEMS pressure sensors include silicon piezoresistive pressure sensors and silicon capacitive pressure sensors. Both are microelectromechanical sensors produced on silicon wafers.

The silicon piezoresistive pressure sensor uses high-precision semiconductor resistance strain gauges to form a Wheatstone bridge as a force-electricity conversion measurement circuit. It has high measurement accuracy, low power consumption and extremely low cost. Piezoresistive sensor for a Wheatstone bridge. If there is no pressure change, its output is zero and almost no power consumption.

Capacitive pressure sensors use MEMS technology to create a grid-like shape on a silicon wafer. The upper and lower two transverse barriers become a group of capacitive pressure sensors. The upper transverse grille is displaced downward by pressure. Changed the spacing between the upper and lower transverse grids. It also changes the size of the capacitance between the plates, that is, △ pressure = △ capacitance.

Extended reading: Industrial Pressure Transmitters|Buy from the manufacturer

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All of our pressure sensors can work with the NEW AMS TERX communicator.

Sino-Inst offers over 20 Silicon Pressure Sensors. A wide variety of  Silicon Pressure Sensors options are available to you. Such as free samples, paid samples. Sino-Instrument is a globally recognized manufacturer of Silicon Pressure Sensors, located in China. Sino-Instrument sells through a mature distribution network that reaches all 30 countries worldwide. Silicon Pressure Sensors products are most popular in Europe, Southeast Asia, and Mid East. You can ensure product safety by selecting from certified suppliers. With ISO9001, ISO14001 certification.

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Product Currency: USD

Product Price: 29

Price Valid Until: 2029-09-09

Product In-Stock: InStock

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